Automatic FOUP/FOSB Cleaning System
Xtrim-FC-A300
Equipment Overview
Loadport*3、Clean Chamber*3 、Vacuum Chamber*3、 Robot
Fully Automated Process
Fully automated process, including lid opening/closing, wafer inspection, cleaning, drying, vacuuming, and dehumidification
High Compatibility
Supports various FOUP/FOSB types without hardware modifications
Superior Process Performance
Particle、AMC（including VOC）、Outgassing controlling
N2 Purge maintains optimal humidity inside the FOUP
High throughput
Capable of cleaning 25-30 FOUP/ FOSB per hour
SEMI S2 F47 Certificated