江蘇芯夢(mèng)半導(dǎo)體設(shè)備有限公司

  • 地址：江蘇省蘇州市吳中經(jīng)濟(jì)開發(fā)區(qū)東吳南路25號(hào)城南科技產(chǎn)業(yè)園7幢（2號(hào)廠房）

  • 電話：0512-67296032

  • 傳真：0512-67296032

  • 企業(yè)郵箱：sales@js-xm.com.cn

合作熱線

  • 戰(zhàn)略合作：fuxing.wang@js-xm.com.cn

  • 技術(shù)交流：louis.shao@js-xm.com.cn

  • 供應(yīng)鏈合作：sunshine@js-xm.com.cn

FOUP/FOSB Cleaner

FOUP/FOSB Inspection System

Xtrim-FI-300

Equipment Overview

Support the complete localization of all components and parts；LD/ULD ;Robot;3D measure；FFU

3D Inspection

  •  3D Multi-Directional Measurement，Z49，Z47，X46，Y52，Y46，R1，Wafer Plane Height，SEMI Standard-specified items (X30, X31, Z30, Z31, etc.)

Automatic Calibration

  • Equipped with an automatic calibration function, which ensures the accuracy of each measurement.

  • High Precision & Consistency: Accuracy up to ±25μm, Repeatability of Multiple Inspections: ±15μm

Low Cost of Ownership (COO)

  • The smallest size in the industry


Field/Product

  • Substrate Manufacturing, Wafer Manufacturing, Advanced Packaging/FOUP、FOSB