Automatic Metal Etching Equipment
Xtrim-SC-ET300
Equipment Overview
Loadport*2、Multi Chambers、Robot、CDU
Chemical Savings
Supports chemical recycling
Compatible with various chemicals
Allows recipe switching based on wafer quantity and processing time
Customizable
Supports wafers from 6”to 12”
Can be customized based on the needs
Pollution Control
Professionally chosen material to better control particles
Modular wafer transfer between chambers in a sealed environment
Intelligent Emergency Wafer Protection System
Software and nozzles prevent the wafer from being over-etched