江蘇芯夢半導(dǎo)體設(shè)備有限公司

  • 地址：江蘇省蘇州市吳中經(jīng)濟(jì)開發(fā)區(qū)東吳南路25號城南科技產(chǎn)業(yè)園7幢（2號廠房）

  • 電話：0512-67296032

  • 傳真：0512-67296032

  • 企業(yè)郵箱：sales@js-xm.com.cn

合作熱線

  • 戰(zhàn)略合作：fuxing.wang@js-xm.com.cn

  • 技術(shù)交流：louis.shao@js-xm.com.cn

  • 供應(yīng)鏈合作：sunshine@js-xm.com.cn

Wet Bench Equipment

Automatic Wet Bench Equipment---CSTLess

Xtrim-BC-L300
Xtrim-BC-L200
Xtrim-BC-L150

Equipment Overview

Load/Unload、Chemical Baths (SPM、HF、SC1、SC2、BOE、H3PO4…) 、 QDR 、Marangoni Dryer，Robot、Transfer… Support Tools: CDS、LCDS

Customizable

  • 8”SMIF LP

  • 12” FOUP LP

  • Suitable for all kinds of potions

  • Process tank can be customized according to demand

Precise contro

  • Professional flow field, temperature control design

  • Precise liquid distribution: Select flowmeter/ metering pump/metering barrel/concentration meter according to the process

  • Precise rehydration: by number of tablets/time/concentration.

Particle control

  • CST-Less mode

  • Professional material selection

  • Gas flow field control system ?Advanced drying system.

Cleanness

  • Equipped with heating, cycling, megasound cleaning and concentration online monitoring technology, enhance the wafer cleaning effect

  • Equipped with Marangoni Dryer to ensure wafer drying and safe production.

Intelligent Emergency Wafer Protection System