江蘇芯夢(mèng)半導(dǎo)體設(shè)備有限公司

  • 地址:江蘇省蘇州市吳中經(jīng)濟(jì)開發(fā)區(qū)東吳南路25號(hào)城南科技產(chǎn)業(yè)園7幢(2號(hào)廠房)

  • 電話:0512-67296032

  • 傳真:0512-67296032

  • 企業(yè)郵箱:sales@js-xm.com.cn

合作熱線

  • 戰(zhàn)略合作:fuxing.wang@js-xm.com.cn

  • 技術(shù)交流:louis.shao@js-xm.com.cn

  • 供應(yīng)鏈合作:sunshine@js-xm.com.cn

Automatic Wet Bench Equipment ---Cassette Type

Xtrim-BC-A300
Xtrim-BC-A200
Xtrim-BC-A150

Equipment Overview

Load/Unload、Chemical Baths(SPM、HF、SC1、SC2 、BOE、H3PO4 、EKC、NMP…)、QDR 、 IR Dryer、Marangoni Dryer 、 Robot、Transfer… Support Tools: CDS、LCDS

Customizable

  • Adaptable to various chemical solutions

  • Customizable tanks

High Throughput

  • Supports mass production with 25/50 wafers

  • Multiple robots operate collaboratively

Compatibility

  • Supports wafers from 8”to 12”

  • Can be applied to substrate manufacturing, integrated circuits and advanced packaging

Flexibility

  • Supports Open Cassette、SMIF、FOUP to load/unload

  • Modular design meets diverse process requirements

Intelligent Emergency Wafer Protection System