江蘇芯夢半導(dǎo)體設(shè)備有限公司

  • 地址:江蘇省蘇州市吳中經(jīng)濟(jì)開發(fā)區(qū)東吳南路25號城南科技產(chǎn)業(yè)園7幢(2號廠房)

  • 電話:0512-67296032

  • 傳真:0512-67296032

  • 企業(yè)郵箱:sales@js-xm.com.cn

合作熱線

  • 戰(zhàn)略合作:fuxing.wang@js-xm.com.cn

  • 技術(shù)交流:louis.shao@js-xm.com.cn

  • 供應(yīng)鏈合作:sunshine@js-xm.com.cn

Horizontal Tube Clean

Xplaim-ST-HTC

Equipment Overview

Mainly used for furnace tube cleaning in processes such as oxidation, diffusion, stripping growth, annealing, epitaxy, etc.

Applicable chamber

  • Applicable to 6” to 12” furnace tubes and also suitable for cleaning other small components

Excellent cleaning uniformity

  • Rolling immersion cleaning with excellent uniformity

High automation level

  • Equipped with a robotic arm for automatic transfer and cleaning between tanks

Customizable

  • Customizable design available according to customer requirements (including customization of tank quantity, chemical solution supply function, chemical recovery tank, etc.)